Publications
Integrated Wafer-Scale Growth and Transfer of Directional Carbon Nanotubes and Misaligned-Carbon-Nanotube-Immune Logic Structures
| Authors | Nishant Patil, Albert Lin, Edward R. Myers, H.-S. Philip Wong, Subhasish Mitra |
| Date | June 17, 2008 |
| Keywords | Wafer-scale Carbon Nanotube Growth, Wafer-scale Carbon Nanotube Transfer, Misaligned-Carbon-Nanotube-Immune |
| How to Cite | Nishant Patil, Albert Lin, Edward R. Myers, H.-S. Philip Wong, Subhasish Mitra, "Integrated Wafer-Scale Growth and Transfer of Directional Carbon Nanotubes and Misaligned-Carbon-Nanotube-Immune Logic Structures," Proceedings of the 2008 VLSI Technology Symposium, June17-20, 2008. |
| Abstract | We successfully demonstrate essential components and their integration for large-scale Carbon Nanotube Field Effect Transistor (CNFET) technology: 1. First demonstration of full-wafer-scale growth of directional carbon nanotubes (CNTs) on 4” single-crystal quartz wafers. 2. First demonstration of full-wafer-scale CNT transfer from 4” quartz wafers to 4” silicon wafers for integration on silicon. 3. Integration of full-wafer-scale growth and transfer, together with metallic-CNT removal, for the first demonstration of misaligned-CNT-immune digital logic structures on a full-wafer-scale. Such logic structures guarantee correct logic functionality in the presence of a large number of misaligned and mis-positioned CNTs. |
| Category | CNTs & CNFETs |